A high-temperature sintering furnace is mainly used for the sintering process of semiconductor components and power rectifier devices. It supports vacuum sintering, protective-gas sintering, and conventional sintering. It is a specialized and newly designed piece of semiconductor equipment featuring compact structure and convenient operation, capable of completing multiple processes on one machine. It can also be used for vacuum heat treatment, vacuum brazing, and other related applications.
I. Power Outage
- If the power goes out and the water supply is also cut, immediately switch on the backup cooling-water source.
- If the outage occurs when the furnace is not in the heating or cooling stage and power can be restored quickly, restart the equipment and continue operation. If power cannot be restored soon, keep the equipment as-is.
- If the outage occurs during heating or cooling and power can be restored quickly, restart the system. If it will take a long time, keep the system in its current state and allow the furnace to cool down naturally.
II. Heating Power Failure
- Low water pressure: if water pressure falls below 0.15 MPa, the pressure gauge will trigger an alarm.
- Ground fault.
- Vacuum discharge: the water-cooled electrode connector and heater connection must be secure, and well-insulated from the reflector screen.
- If furnace pressure is 13.3–66.5 Pa and the power fails, it may be caused by dielectric breakdown leading to electrical discharge.
III. Protective Gas Supply Stoppage
- If gas takes too long to charge or cannot enter before vacuum pumping starts, check whether the gas pipeline is blocked.
- If the pipeline is normal, check the solenoid valve and gas filling valve. For safety, stop all related equipment before inspection.
- If gas filling into the vacuum chamber cannot stop, and the pressure relief valve activates, close the gas supply valve and all piping in the gas system.
- Check for leaks in the gas charging pipeline. Any leakage will affect product quality.
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